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Design and Measurement of a Miniaturized Three Dimensional Electric Field Sensor |
Zhang Xing①②; Bai Qiang①; Xia Shan-hong①; Zheng Feng-jie①②; Chen Shao-feng① |
①State Key Lab of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100080, China; ②Graduate School of the Chinese Academy of Sciences, Beijing 100039, China |
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Abstract Electric field sensors used at present are only capable of measuring one or two dimensional values of electric field intensity. A miniaturized electric field sensor used for measuring three dimensional electric field is introduced, which is composed of axial(Z) and radial(X, Y) electric field measuring units, driving unit and circuit unit. The practicability of the three dimensional electric field sensor is demonstrated, and it is shown that the theoretical prediction and experimental result are in good agreement.
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Received: 12 September 2005
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