|
|
|
| A New Type of the System-on-Chip Based on pH-ISFET |
| Wang Zu-min①②; Ren Zhen-xing①②; Han Jing-hong①; Bian Chao①; Yang Hai-gang①; Xia Shan-hong① |
| ①State Key Laboratory of Transducer Technology, Institute of Electronics,CAS, Beijing 100080, China; ②Graduate University of Chinese Academy of Sciences, Beijing 100049, China |
|
|
|
|
Abstract A new type of System-On-Chip (SOC) integrated with ISFET/REFET/PRE and their signal detection circuits is developed. Carring out the basic chip with commercial standard CMOS processes, the preparation technique of sensitivity membrane compatible with the SOC and interrelated follow-up processes are explored, the H+ sensitive Polypyrrole (Ppy) membrane is emphatically studied by electrochemical polymerization; It is compared with the SOC which developed by low temperature Ta2O5 preparation technique. The new SOC has the sensitivity of 54mV/pH, response time of 0.1s, linear correlation coefficient of 99.99% within the pH range from 1 to 12.
|
|
Received: 03 July 2006
|
|
|
|
|
|
|
|
|
2007, Vol. 29 
