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| Integrated Electromechanical Model and Applications of Bridge Height and Phase Shift in Distributed MEMS Phase Shifter |
| WANG Congsi① YIN Lei② LI Fei① YING Kang① ZHANG Yiqun③ WANG Meng④ |
①(Key Laboratory of Electronic Equipment Structure Design, Ministry of Education, Xidian University, Xi’an 710071, China)
②(Xi’an Research Institute of Huawei Technologies, Xi’an 710075, China)
③(Nanjing Research Institute of Electronics Technology, Nanjing 210039, China)
④(Shaanxi Huanghe Group Co., Ltd., Xi’an 710043, China) |
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Abstract Phase shifter is the “steering wheel” to control the beam direction of Phased Array Antenna (PAA), which determines the performance of the PAA. Micro Electronic Mechanical System (MEMS) phase shifter has obvious advantages for PAA, but there always exists structural deformation caused by the complex work environment and environmental load of the PAA, which has serious impact over the performance of the PAA. Therefore, the coupling between the key structural parameters of MEMS phase shifter and the electrical parameters is studied by transmitting the influence of complex environmental factors on structure of MEMS to the structural and electrical parameters. The electromechanical integrated model of distributed MEMS phase shifter is derived. Besides, the rapid performance assessment and structural tolerance of the deformed MEMS phase shifter is calculated based on the coupled model. The simulation results show the effectiveness of the coupled model and the engineering application value.
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Received: 24 July 2017
Published: 14 March 2018
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| Fund:The National Natural Science Foundation of China (51522507, 51475349, 51490660), The National 973 Plan of China (2015CB857100), Shaanxi Province Youth Science and Technology New Star Program (2016KJXX-06), The Special Funds for Basic Scientific Research Services in Central Colleges and Universities (JBG150409, KJXX1603, 7214479606) |
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Corresponding Authors:
WANG Congsi
E-mail: congsiwang@163.com
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