一种电极型MEMS电场传感器封装结构

doi:10.11999/JEIT160608

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Abstract

To improve the environmental adaptation of the package of electric field micro sensor, this article introducs a new electrode package. Different from placing the sensing chip and package inside the measured environment, a package electrode, which is the only part exposed outside, is invented. In this way, the package shell is effectively protected from various environmental extremes. Based on this structure, new atmospheric electric field micro sensors are introduced on the ground and for sounding. The FEM and experiments show that the new sensors measure electric field accurately and stably under high humidity and low temperature environment.

Key words： Electric field micro sensor Micro-Electro-Mechanical System (MEMS) Package Environmental adaptation Atmospheric electric field

Received: 08 June 2016 Published: 30 September 2016

PACS:

TP212

Fund:

The National Natural Science Foundation of China (61302032, 61327810, 61201078)

Corresponding Authors: WEN Xiaolong E-mail: wenguangguy@163.com

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	WEN Xiaolong
	REN Tianling
	XIA Shanhong

Cite this article:

WEN Xiaolong,REN Tianling,XIA Shanhong. Electrode Package for Electric Field Micro Sensor[J]. JEIT, 2016, 38(11): 2960-2964.

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http://jeit.ie.ac.cn/EN/10.11999/JEIT160608 OR http://jeit.ie.ac.cn/EN/Y2016/V38/I11/2960

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