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| Measuring Method of Three Dimensional Atmospheric Electric Field Based on Coplanar Decoupling Structure |
| Wen Xiao-long①② Peng Chun-rong① Fang Dong-ming① Yang Peng-fei③ Chen Bo① Xia Shan-hong① |
①(Institute of Electronics, Chinese Academy of Seiences, Beijing 100190, China)
②(University of Chinese Academy of Sciences, Beijing 100049, China)
③(Institute of Microelectronics, Peking University, Beijing 100871, China) |
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Abstract To deal with the issue of coupling between three components of electric field in measuring, this paper presents a new 3-D testing method based on coplanar decoupling structure. Different from the conventional testing method, which places sensing elements in three orthogonal directions of X, Y, Z, in the proposed method sensing elements are arranged un-collinearly in the same plane, and the demodulation of X, Y, Z components from three sensing elements is realized by utilizing an electric field coupling sensitivity matrix. A three dimensional electric field sample sensor is developed using MEMS chips as sensing elements. Furthermore, an innovative fixture is designed, which can realize the sensor rotation of any angle, and the corresponding calibration and testing system is built up. Experiments show that the proposed 3-D electric field sensor can realize the accurate measurement, and it has a simple structure. The coupling interferences among three electric field components are eliminated, which improves the measurement accuracy.
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Received: 09 December 2013
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Corresponding Authors:
Xia Shan-hong
E-mail: shxia@mail.ie.ac.cn
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2014, Vol. 36 
