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| A Novel Moving-electrode Approach to Reduce the Electrode-disk-gap of MEMS Disk Resonator |
| Deng Cheng① Bao Jing-fu① Du Yi-jia① Zhao Xing-hai② |
①(School of Electronic Engineering,University of Electronic Science and Technology of China, Chengdu 611731, China)
②(China Academy of Engineering Physics, Mianyang 621900, China) |
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Abstract For the problem of great series motional resistance in Micromechanical (or MEMS) disk resonator, a novel moving-electrode approach is presented to reduce the electrode-disk gap and the series motional resistance of resonator. This approach introduces the tunable property of other RF MEMS devices to disk resonators in the existing fabrication conditions. The series motional resistance of the disk resonator is reduced. The paper introduces the theory and design of the disk resonator with suspended electrode, derives the effective gap width after electrode’s moving, proposes a circle-shaped groove produced by hole in a mask to solve the point contact problem between electrode and disk and analyzes the effect of circle-shaped groove on the effective gap width. In ANSYS10.0, the suspended electrode is pulled in the fixed bar with voltage of 2.10 V (0.1 μm) or 66.38 V (1 μm) and gap of 0.0016 μm or 0.01 μm. For 0.1~1.1 μm gap resonator, the series motional resistance drops below its 10-8 times.
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Received: 25 April 2011
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Corresponding Authors:
Bao Jing-fu
E-mail: baojingfu@uestc.edu.cn
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2012, Vol. 34 
