聚焦电子束离子束用的低球差塞普帖静电透镜的特性

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Abstract As a small spherical aberration eleetrostatic lens Septier s lens has been proved to be an almost ideal structure by a number of experiments. This paper provides a meth-od of calculating all the physical characteristics of Septier s electrostatic lens. It also provides the calculated results at various geometrie sizes and voltages; they are useful for making correct choice under different conditions.

Received: 26 November 1980

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	TU Li-Shan

Cite this article:

TU Li-Shan. THE PHYSICAL CHARACTERISTICS OF A SMALL SPHERICAL ABERRATION SEPTIER S ELECTROSTATIC LENS FOR ELECTRON OR ION BEAM FOCUSING[J]. , 1982, 4(6): 372-383.

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http://jeit.ie.ac.cn/EN/ OR http://jeit.ie.ac.cn/EN/Y1982/V4/I6/372