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FABRICATION OF JOSEPHSON TUNNEL JUNCTION WITH SUSPENDED METAL MASK |
Shi Xianqing; Yang Caibing; Cao Xiaoneng; Ma Jindi; Li Xizhi; Huang Jizhang; Li Xiaoli |
Institute of Electronics Academia Sinica |
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Abstract A small area Josephson tunnel junction is fabricated with suspended metai mask which is made from ordinary razor blades. The junction overlap is formed by two succeeding evaporations of susperconductor materials at oblique angles. The advantages of this technique are that the fabrieation processes ean be performed continuously without opening the evaperation chamber and also it is suitable for making a small area tunnel junction. The I-V charaeteristic of a tunnel junction made by this technique has been taken at 4.2K.
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Received: 13 February 1984
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