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REMOVING OF THE CARBON CONTAMINATION FROM GaAs, GaP, InP, GaInAs AND GaInPAs SURFACES |
Tao Zhaomin; Xia Changhong; Pan Xiaodan; Pan Xia |
Intitute of Electronics Academia Sinica Beijing |
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Abstract The different results of removing the carbon contamination with UV/O3from the GaAs, GaP, InP, GaInAs and GaInPAs surfaces are given.
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Received: 02 September 1987
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