Abstract Deep levels in Ga1-xAlxAs/GaAs double-heterojunction LEDs have been studied by DLTS. The Ga1-xAlxAs DH material was grown by LPE technique. The dark deitcts are ob-jerved with an infrared line scanner. The effect of the oxygen contamination on the deep levels in Si-doped active layer is found. The activation energy EC-ED≈0.29 eV. The DSD are sometimes generated in the emitting area. It did not related to the deep levels obviously.