分子束外延生长的GaAs-Al<sub>x</sub>Ga<sub>1-x</sub>As多层异质结构中的“精细低维调制条纹”的观察

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Abstract Fine low dimensional modulated fringes (FLDMF) by named in GaAs/ Al_xGa_1-xAs multilayer heterostructures using transmission electron microscopy (TEM) have been observed. Philips EM400ST and JEOL EM4000EX were used in this work. The FLDMF with equal width were discovered within the buffer layer and also within the two adjacent superlattice layers of GaAs/AlGaAs The width with 9.1 Å is GaAs fringes, 12 Å is AlGaAs fringes. Some results from the density analysis of the fringes using microdensitometer are presented. Otherwise lattice image of GaAs/Al_xGa_1-xAs multilayer heterostructures and analytic results of composition in GaAs/Al_xGa_1-xAs multilayer heterostructures by using the techniques of energy dispersive X-ray analysis (EDX) have been given.

Key words： GaAs/Al_xGa_1-xAs Fine low dimensional modulated fringes Superla-ttice Lattice image

Received: 29 December 1987

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	Fan Rongtuan
	C. J. Humphreys

Cite this article:

Fan Rongtuan,C. J. Humphreys. OBSERVATION OF FINE LOW DIMENSIONAL MODULATED FRINGES IN GaAs/Al_xGa_1-xAs MULTILAYER HETEROSTRUCTURES GROWN BY MBI[J]. , 1990, 12(1): 93-99 .

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http://jeit.ie.ac.cn/EN/ OR http://jeit.ie.ac.cn/EN/Y1990/V12/I1/93