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| THE SIMULATION FOR MICROWAVE PLASMA BREAKDOWN PROCESS |
| Zhu Dajun; Liu Sbenggang |
| Inst. of High Energy Electronics, UEST of China, Chengdu 610054 |
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Abstract Using the fluid model and making the plasma as isotropic medium, the microwave field in a cylindrical cavity is obtained. Coupled with fluid equations for the electron and ion motion, the microwave discharge courses are calculated. The results show that the density distribution of ion and electron is similar to electric field distribution. Also, a critical electron density is exist. Above this density, microwave field will damp rapidly, so the gas ionization is mainly on the surface.
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Received: 12 May 1995
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1997, Vol. 19 
