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| HIGH-EFFICIENCY OPERATION OF A DISCHARGE-EXCITED XeF(B→X) EXCIMER LASER |
| Mei Qichu①; P. J. M. Peters②; W. J. Witteman② |
| ①Institute of Electronics, Academia Sinica, Beijing 100080;②Department of Applied Physics, University of Twente, The Netherlands |
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Abstract In an X-ray preionized XeF(B→X) discharge-excited laser driven by a prepulse-main pulse circuit with magnetic isolation and a pulse compressor the dependances of the laser output and conversion efficiency on gas composition, total gas pressure, circuit parameters and delay time were experimentally investigated. A considerable improvement in the laser performance was achieved. An output energy of 345 mJ with an overall efficiency of 3% was obtained from an active volume of 0.11L at a total gas pressure of 2.5×105 Pa in a NF3/Xe/Ne mixture.
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Received: 01 March 1996
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1997, Vol. 19 
