阴极-敏感膜复合型真空微电子压力传感器研究

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Abstract This paper proposes a novel "cathode-on-membrane" vacuum microelectronic pressure sensor. The "cathode-on-membrane" structure has been fabricated. The properties of the silicon membrane under pressure are simulated, and the effects of the parameters of membrame structure on the sensitivity are discussed.

Key words： Vacuum microelectronic Pressure sensor

Received: 01 April 1999

PACS:

TP212

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	Tao Xinxin
	Xia Shanhong
	Su Jie
	Chen Shaofeng

Cite this article:

Tao Xinxin,Xia Shanhong,Su Jie等. RESEARCH ON "CATHODE-ON-MEMBRANE" VACUUM MICROELECTRONIC PRESSURE SENSOR[J]. , 2001, 23(1): 81-84 .

URL:

http://jeit.ie.ac.cn/EN/ OR http://jeit.ie.ac.cn/EN/Y2001/V23/I1/81

[1]	Zhu Dazhong. DESIGN AND RESEARCH OF QUASI-PLANAR SELF-ALIGNED SILICON AVALANCHE ELECTRON EMISSION ARRAY[J]. , 1998, 20(3): 429-432 .