Integrated Electromechanical Model and Applications of Bridge Height and Phase Shift in Distributed MEMS Phase Shifter
WANG Congsi① YIN Lei② LI Fei① YING Kang① ZHANG Yiqun③ WANG Meng④
①(Key Laboratory of Electronic Equipment Structure Design, Ministry of Education, Xidian University, Xi’an 710071, China) ②(Xi’an Research Institute of Huawei Technologies, Xi’an 710075, China) ③(Nanjing Research Institute of Electronics Technology, Nanjing 210039, China) ④(Shaanxi Huanghe Group Co., Ltd., Xi’an 710043, China)
Abstract：Phase shifter is the “steering wheel” to control the beam direction of Phased Array Antenna (PAA), which determines the performance of the PAA. Micro Electronic Mechanical System (MEMS) phase shifter has obvious advantages for PAA, but there always exists structural deformation caused by the complex work environment and environmental load of the PAA, which has serious impact over the performance of the PAA. Therefore, the coupling between the key structural parameters of MEMS phase shifter and the electrical parameters is studied by transmitting the influence of complex environmental factors on structure of MEMS to the structural and electrical parameters. The electromechanical integrated model of distributed MEMS phase shifter is derived. Besides, the rapid performance assessment and structural tolerance of the deformed MEMS phase shifter is calculated based on the coupled model. The simulation results show the effectiveness of the coupled model and the engineering application value.
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