Non-contact Human Body Electrostatic Voltmeter Based on MEMS Technology
WEN Xiaolong①② PENG Chunrong① YANG Pengfei①② CHEN Bo① XIA Shanhong①
①(State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Science, Beijing 100190, China) ②(Beijing Tflying Transducer Technology Co. Ltd., Beijing 100084, China)
The vibrating or rotating parts of the traditional non-contact voltmeters are exposed, thus they can not be used in high-risk areas, and can hardly measure moving bodies. To solve the above problems, this paper develops new non-contact voltmeters based on MEMS electric field sensors. A new detecting electrode, which connects to the sensor chip, is brought out and effectively enhances the sensitivity. Eleven electrodes are placed on a door frame, and measure the charge distribution of head, shoulder, arm, hand, leg and foot at the same time. By means of a metal human body model, a new calibration method for application is proposed. The voltmeter built in this paper is accurately calibrated. The voltmeters have significant advantages, such as no exposed moving components, safety, high environmental adaptability, and therefore can be used under high dust concentration, high concentration of flammable gas and other harsh environments. Test results show that the measurement range is -30~30 kV, the volt resolution is better than 50 V, and the uncertainty is better than 3%.
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