①(National Key Laboratory of Micro/Nano Fabrication Technology, Peking University, Beijing 100871, China) ②(State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China) ③(Institute of Microelectronics, Tsinghua University, Beijing 100084, China)
In this paper, a novel ground atmospheric electric field sensor based on MEMS electric field sensing chip is presented, which resolves the problems of motor wear, high power consumption and failure rate of the conventional electric field mill. The chip is fabricated in a commercial SOIMUMPS process, and the area of this chip is only 5.5 mm×5.5 mm. A weak signal detection method for the chip is proposed. The sensor overall structure scheme is designed, and the sensitivity model is established. The minimum detectable electric field of the sensor is 10 V/m with an uncertainty of 0.67% in the range of -50 kV/m～50 kV/m, and its power consumption is only 0.62 W. The outdoor test shows that the plotted data of the sensor agrees well with those of USA Campbell field mill on both sunny days and thunderstorm days, which indicates that the developed sensor can meet the requirement of lighting monitoring and early warning.
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