Electric Field Micro-sensor with a Closed-loop Autonomous Driving Circuit
Xiong You-ya①②; Peng Chun-rong①; Xia Shan-hong①
①State Key Lab of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China; ②Graduate University of the Chinese Academy of Sciences, Beijing 100039, China
Abstract：A new micromechanical electric field sensor system with a closed-loop autonomous driving circuit is designed and simulated. The closed-loop autonomous driving circuit, which uses the principle of auto-gain-control, keeps the micro sensor working in the resonance state, and keeps the stable resonance amplitude. The simulation result shows, compared with the open-loop driving mode, the sensor can catch the new resonance frequency, the attenuation of libration amplitude is reduced from 30% to 0.1%, and the attenuation of the sensitivity of the sensor is reduced from 50% to 0.1%, when the resonance frequency changes 0.5%.
2009, Vol. 31 
