Abstract:This papet stuides parallel EIS type light addressable semiconductor humor analysis sensor based on light addressable potentiometric sensor.The effects of the basis voltage,light modulation frequencies and light radiation power on photovoltage for the sensor with backside illumination are studied mainly.The optimized result of these parameters is given.Good response characteristics were obtained when it was used in determination of the pH(1-10pH),pO2(0.9-10ppm) and concentration of glucose (10-5~10-2M) in sample liquid.