Abstract:A micro-machined single crystal beam resonator for high accuracy pressure sensors by utilizing Micro-ElectroMechanical System (MEMS) technology has been successfully fabricated. By means of thermal excitation, the frequency response (including amplitude and phase) of the resonator has been characterized with an open-loop frequency sweeping method. The -3dB width of resonant peak (less than 1.2Hz) corresponds a very high quality factor Q value greater than 33000 in vacuum at room-temperature. The frequency response of the resonator
at different levels of excitation has been discussed theoretically and experitrientally The result shows a good linearity of frequency versus excitation power at lower excitation power, and is coincident with the theory.