Abstract:This paper describes a kind of micro-array Light Addressable Potentionietric Sen-sor(LAPS) system based on the Electrolyte-Insulator-Semiconductor (EIS) structure, in which electronic technology, optical technology and mechanical technology are applied. The mecha-nism of the LAPS is investigated and a trial specimen of the LAPS is developed ? The research work finds how the thickness of the chip, the linearity of the I-V curve and frequency affect the performance of the LAPS system, and obtains testing results of urea, penicillin and pH value.